Electrical Conduction Mechanisms of Pure and Fe Doped TiO2 thin Films for IC Technology

Abstract

Sol-gel dip coating was used to obtain undoped and Fe doped TiO 2 thin films deposited on ITO (Indium tin oxide) coated glass substrate. These films were sintered at 500 ‹? C for 1 hour. The particle size decreases with increase in Fe concentration. The electrical properties were analyzed by Electrometer in the voltage range -30V to +30V. We examined the various conduction mechanisms i.e. Schottky mechanism, Poole Frenkle mechanism, ohmic and space charge limited current mechanism etc. The dominant conduction mechanism is space charge and Pool-Frenkel conduction mechanism. These conduction mechanisms depend upon the deposition parameters like sintering temperature, nature of substrate, thickness of films, nature and amount of dopant.

Keywords

conduction mechanisms sintering temperature. sol-gel

  • Research Identity (RIN)

  • License

    Attribution 2.0 Generic (CC BY 2.0)

  • Language & Pages

    English, 81-85

  • Classification

    FOR Code: 090699